F235x Compact Thermal Mass Flow Meter
Product Advantages：Ultra-wide turndown ratio Measurement Range：0.02 … 3000 SLM Turndown Ratio：1:100
The F235 series is used to accurately measure the gas mass flow. It is based on thermal measurement technology. It can measure the mass flow directly, pressure and temperature compensation is not required. It integrates MEMS (Micro-Electro-Mechanical Systems), signal processing, digital simulation and other technologies
Its principle and technical foundation ensure the outstanding performance of the F235 series in terms of sensitivity, pressure loss, turndown ratio, response time and micro flow measurement
The F235 series displays flow consumption via a local display. Additionally, analog and digital outputs support remote data acces
- Based on the thermal flow measurement principle, it’s not required to compensate gas pressure and temperature, integrated temperature measurement
- Based on micro electromechanical systems (MEMS) made with CMOS semiconductor processes, enabling high-precision measurements in millimeter dimension
- Ultra-wide turndown ratio, lower limit can reach 0.04 SLM (DN3)
- Integrates digital adaptive signal processing technology to effectively suppress random errors
- The fully isolated electrical structure can completely filter out field disturbance
- Standard Modbus RTU (RS485) interface and 4 to 20 current output
Suitable for precise low-flow measurement of compressed air, nitrogen, oxygen, hydrogen, and other industrial gases. Ideal for gas consumption monitoring, laboratory testing, semiconductor manufacturing, and industrial gas flow control.
| Measuring Medium | Power | ||
|---|---|---|---|
| Medium | Compressed air, oxygen, nitrogen, hydrogen, laughing gas (nitrous oxide), carbon dioxide, natural gas, argon, helium, silane, ammonia, phosphorus oxychloride, nitrogen trifluorideand other non-condensable gases | Measuring Stage | 24 VDC 0.5W @ 24VDC |
| Flow | Output | ||
| Measuring Range | Refer to “Flow Range” table | 4 … 20 mA Output (Standard) | Flow rate |
| Accuracy | ± 1.5% FS. | Digital Output | Modbus RTU RS485 (Standard) |
| Reference Conditions | 20 °C, 1 bar(a) – ISO 1217 | Connector | Wiring terminal |
| Repeatability | ± 0.25% FS | ||
| Zero Point Drift | < 0.1% FS | ||
| Response Time | < 20 ms | ||
| Operating Pressure | 1.7 MPa(a) | ||
| Pressure Loss | 3 kPa (Full range) | ||
| Temperature | Material | ||
| Medium Temperature | -20 … +60 °C | Flow Channel | SUS304 or SUS316L |
| Seal | Fluorine rubber, EPDM rubber, customized | ||
| Connector | SUS304 or SUS316L | ||
| Mechanical | |||
| Process Connection | Refer to “Flow Range” table | ||
| Dimension | Refer to “Flow Range” table | ||
| Weight | <1.0 kg | ||
| Protection Code | IP54 | ||
IM_F235x_Small-Flow-Mass-Flow-Meter_YUA_EN_2024-V1.03.pdf570 KB
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